

LDU6 UV Wafer Laser Cutting System researched by HGLaser is with internationl advanced lever.It is adopted with UV cold laser source, with small heat affected zone and fine scribing quality. Non-contact processing which avoids stress generates during processing can increase the cutting quality and efficiency of the crystalline grain.After processing, the chip will have good electrical performance. This system which is integrated with manual cutting system and CCD graph processing system can acheive manual cutting or auto cutting.
| 1.Highlights |
Advanced hardware control technology and intelligent software
High laser beam quality, small focus, long service lifetime of laser
Auto graph identifing and positioning function
High precision 2 dimension moving working table, high accuracy rotary working table
High reliabity, high stability and high security
After cutting, the crystalline grain with high quality and high yield
Key panel controlling,easy operation.
Advanced hardware control technology and intelligent software

High laser beam quality, small focus, long service lifetime of laser

High precision 2 dimension moving working table

high accuracy rotary working table

Auto graph identifing and positioning function


Key panel controlling,easy operation
| 2Applications |
This system is applied in cutting semiconductor wafer product,such as single, double mesa glass passivation diode wafer, single&double mesa SCR wafer and IC wafer etc.




| 3. Technical Parameters |
|
Model |
LDU6 |
|
Wavelength |
Short wavelength purple laser |
|
Max.journey area |
250300Random rotation angle of axle |
|
Max.processing area |
4 inches |
|
Positioning accuracy |
0.004mm |
|
Repeatability |
0.002mm |
|
Rotary accuracy |
0.001degree |
|
Min.spot diameter |
0.020mm |
|
Cutting depth |
0-0.5mm |
|
Cutting speed |
0∼80mm/s |
|
Cutting line width |
0.02∼0.06mm |
|
Laser generator |
Q switch solid diode pulse purple laser |
|
Power |
220V AC10%50-60Hz |
|
Supply pressure range |
0.5∼0.8Mpa (5.0∼8.0kgf/cm2) |
|
Dimensions |
Main machine(LWH):10508801600mm |
|
Working environment demands |
Temperature 15-35C |
|
Others |
Without corrosive gas or liquid, strong magnetic field, and strong electric field |

Focus every possibility




